Semiconductors

Semiconductors

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    Microsensors, MEMS and Smart Devices

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    Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes (Springer Series in Surface Sciences, 60)

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  • Growth and Transport in Nanostructured Materials: Reactive Transport in PVD, CVD, and ALD (SpringerBriefs in Materials)

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